Detecting Nanoscale Perturbations Using New Forms of Optical Microscopy
Center for Advanced Study
Levis Faculty Center--Music Room (208)
919 W. Illinois, Urbana
In this talk, Professor Goddard will discuss several new forms of optical microscopy that his group developed this past year. Their goal was to recover tiny nanoscale features using a conventional microscope. This problem is challenging because of the low signal to noise ratio for such features. In the first method, they introduced the regularized pseudo-phase and used it to measure nanoscale defects, minute amounts of tilt in patterned samples, and severely noise-polluted nanostructure profiles in optical images and to study the dynamics of droplet condensation using environmental scanning electron microscopy. In the second method, they built upon electrodynamic principles (mechanical work and force) of the light-matter interaction and applied it to sense sub-10 nm wide perturbations. In the third method, they applied machine learning on simulated ellipsometry spectra and successfully extracted multiple critical dimensions with sub-1 nm accuracy from experimental spectra. In the fourth method, they introduced the concepts of electromagnetic canyons and non-resonance amplification using nanowires and applied these concepts to directly view individual perturbations (25-nm radius = λ/31) in a nanoscale volume.
Department of Electrical & Computer Engineering, Associate 2018-19